Atomic Layer Deposition Growth Reactions of Al2O3 on Si(100)-2×1
- 10 March 2004
- journal article
- Published by American Chemical Society (ACS) in The Journal of Physical Chemistry B
- Vol. 108 (13), 4058-4062
- https://doi.org/10.1021/jp0378079
Abstract
No abstract availableThis publication has 23 references indexed in Scilit:
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