Process alternatives and scaling limits for high-density silicon tactile imagers
- 30 April 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 23 (1-3), 915-918
- https://doi.org/10.1016/0924-4247(90)87059-r
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Scaling limits in batch-fabricated silicon pressure sensorsIEEE Transactions on Electron Devices, 1987
- Resonant-microbridge vapor sensorIEEE Transactions on Electron Devices, 1986
- A high-performance silicon tactile imager based on a capacitive cellIEEE Transactions on Electron Devices, 1985