Model for MEMS Switches Power Handling and Phase Noise
- 1 October 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
This paper focus on an electromechanical model for the MEMS varactors based on electrical/mechanical equivalencies. It allows the MEMS varactors capacitance computation and take into account MEMS power handling and phase noise due to Brownian noise. It has been validated with measurements on a shunt MEMS varactor but it can be extend to a wide range of MEMS components.Keywords
This publication has 5 references indexed in Scilit:
- Nonlinear dynamic modeling of micromachined microwave switchesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- An electromechanical model for MEMS switchesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- RF MEMS switches and switch circuitsIEEE Microwave Magazine, 2001
- Modeling of nonlinear micromechanical resonators and their simulation with the harmonic-balance methodInternational Journal of RF and Microwave Computer-Aided Engineering, 2001
- Microwave MEMS-based voltage-controlled oscillatorsIEEE Transactions on Microwave Theory and Techniques, 2000