Raman characterization of SOI-SIMOX structures
- 31 October 1992
- journal article
- Published by Elsevier in Materials Letters
- Vol. 15 (1-2), 122-126
- https://doi.org/10.1016/0167-577x(92)90026-g
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Raman scattering and photoluminescence analysis of silicon on insulator structures obtained by single and multiple oxygen implantsJournal of Applied Physics, 1991
- Strains in Si-on-SiO2 structures formed by oxygen implantation: Raman scattering characterizationApplied Physics Letters, 1988
- Raman scattering measurement of silicon-on-insulator substrates formed by high-dose oxygen-ion implantationJournal of Applied Physics, 1988