Deposition processes for films and coatings
- 1 July 1986
- journal article
- review article
- Published by Springer Nature in Journal of Materials Science
- Vol. 21 (7), 2217-2223
- https://doi.org/10.1007/bf01114260
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Formation of β‐Si3N4 Coatings by Chemical Vapor DepositionJournal of the American Ceramic Society, 1983