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Quantitative Detection of Oxygen in Silicon Nitride on Silicon
Home
Publications
Quantitative Detection of Oxygen in Silicon Nitride on Silicon
Quantitative Detection of Oxygen in Silicon Nitride on Silicon
PH
P. H. Holloway
P. H. Holloway
HS
H. J. Stein
H. J. Stein
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1 May 1976
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 123
(5)
,
723-728
https://doi.org/10.1149/1.2132916
Abstract
No abstract available
Cited by 34 articles