Scanning microdeformation microscopy
- 22 February 1993
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 62 (8), 829-831
- https://doi.org/10.1063/1.108592
Abstract
We have developed a new scanning microscope based on a vibrating contact tip and piezoelectric detection. Scanning the sample reveals surface topography and mainly, subsurface elastic properties. The preliminary images presented show surface and subsurface inhomogeneities in metallic samples. Lateral resolution is essentially related to the tip diameter as in near-field microscopes.Keywords
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