Selective oxidation and chemical state of Al and Ti in (Ti, Al)n coatings
- 1 July 1988
- journal article
- Published by Wiley in Surface and Interface Analysis
- Vol. 12 (6), 329-333
- https://doi.org/10.1002/sia.740120602
Abstract
No abstract availableKeywords
This publication has 17 references indexed in Scilit:
- Comparison of cutting performance of ion-plated NbN, ZrN, TiN and (Ti, Al)N coatingsSurface and Coatings Technology, 1987
- Microstructure and physical properties of polycrystalline metastable Ti0.5Al0.5N alloys grown by d.c. magnetron sputter depositionThin Solid Films, 1987
- Industrial deposition of binary, ternary, and quaternary nitrides of titanium, zirconium, and aluminumJournal of Vacuum Science & Technology A, 1987
- Titanium aluminum nitride films: A new alternative to TiN coatingsJournal of Vacuum Science & Technology A, 1986
- Morphology and properties of sputtered (Ti,Al)N layers on high speed steel substrates as a function of deposition temperature and sputtering atmosphereJournal of Vacuum Science & Technology A, 1986
- Characterization of nitride coatings by Auger electron spectroscopy and x-ray photoelectron spectroscopyJournal of Vacuum Science & Technology A, 1986
- A high rate sputtering process for the formation of hard friction-reducing TiN coatings on toolsThin Solid Films, 1982
- How much can Auger electrons tell us about solid surfaces?Published by Springer Nature ,1975
- Über die Oxydation der TitannitridsZeitschrift für Physikalische Chemie, 1957
- Über die Oxydation des TitannitridsZeitschrift für Physikalische Chemie, 1957