The use of sputtered ZnO piezoelectric thin films as broad-band microactuators
- 30 October 1997
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 63 (2), 135-139
- https://doi.org/10.1016/s0924-4247(97)01520-3
Abstract
No abstract availableKeywords
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