Two Ion Sources for the Production of Multiply Charged Nitrogen Ions

Abstract
Two ion sources have been developed for the production of milliamperes of N+, N2+, N3+, and N4+ ions. Under good operating conditions, 28 ma of N3+ and 10 ma of N4+ are produced. Details of source construction are given and a method for analyzing the source output is presented. Characteristics of both sources as a function of arc current and arc voltage are investigated.