Combined low-energy ion scattering and x-ray photoelectron spectroscopy study of Ta2O5 bombarded by 500–3000-eV He ions

Abstract

The low‐energy ion backscattering spectra of Ta₂O₅ obtained with He as the probe gas exhibit a pronounced low‐energy tail on the metal peak and a strong incident ion energy dependence of the oxygen to tantalum peak intensity ratio. To determine the effect differential scattering cross sections, ion neutralization, and sample reduction have on these spectral features, a combined ISS–XPS study has been carried out. The data indicate that the sample is not reduced by the He ion beam and that a resonant‐type neutralization plays a dominant role both in tailing and in the variation of the oxygen to tantalum peak intensity ratio.