Micromachining using deep ion beam lithography
- 1 July 1997
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 130 (1-4), 155-159
- https://doi.org/10.1016/s0168-583x(97)00275-9
Abstract
No abstract availableKeywords
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