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Low cost spinner for semiconductor surface preparation prior to MBE growth
Home
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Low cost spinner for semiconductor surface preparation prior to MBE growth
Low cost spinner for semiconductor surface preparation prior to MBE growth
DM
D. L. Miller
D. L. Miller
PN
P. G. Newman
P. G. Newman
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1 May 1981
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 19
(1)
,
124
https://doi.org/10.1116/1.571005
Abstract
A simple and inexpensive method has been devised for clean and reproducible gallium arsenide surface preparation. Etching during spinning is followed by rinsing and gas drying at high RPM.
Keywords
SPINNER
SEMICONDUCTOR
PRIOR
REPRODUCIBLE
ARSENIDE
DEVISED
INEXPENSIVE
GALLIUM
RPM
MBE
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Cited by 3 articles