Asymmetric bipolar pulsed DC: the enabling technology for reactive PVD

Publisher Website

31 January 1998

journal article
Published by Elsevier in Surface and Coatings Technology

Vol. 98 (1-3), 1245-1250
https://doi.org/10.1016/s0257-8972(97)00403-9

Abstract

No abstract available

Cited by 122 articles