Thermal stability of Al–O–N PVD diffusion barriers
- 10 October 1998
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 108-109, 48-58
- https://doi.org/10.1016/s0257-8972(98)00614-8
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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