Piezoelectric force sensor for scanning force microscopy
- 31 May 1994
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 43 (1-3), 305-310
- https://doi.org/10.1016/0924-4247(93)00665-q
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
- Atomic force microscopy using a piezoresistive cantileverPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Development of a force sensor for atomic force microscopy using piezoelectric thin filmsNanotechnology, 1993
- Force measurement with a piezoelectric cantilever in a scanning force microscopeUltramicroscopy, 1992
- An atomic-resolution atomic-force microscope implemented using an optical leverJournal of Applied Physics, 1989
- Erratum: Novel optical approach to atomic force microscopy [Appl. Phys. Lett. 5 3, 1045 (1988)]Applied Physics Letters, 1988
- Atomic resolution imaging of a nonconductor by atomic force microscopyJournal of Applied Physics, 1987
- Atomic Resolution with Atomic Force MicroscopeEurophysics Letters, 1987
- Atomic force microscope–force mapping and profiling on a sub 100-Å scaleJournal of Applied Physics, 1987
- Atomic Force MicroscopePhysical Review Letters, 1986
- Silicon as a mechanical materialProceedings of the IEEE, 1982