Backscattering correction for quantitative Auger analysis: II. Verifications of the backscattering factors through quantification by AES
- 1 March 1982
- journal article
- Published by Elsevier in Surface Science
- Vol. 115 (2), 259-269
- https://doi.org/10.1016/0039-6028(82)90406-x
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Backscattering correction for quantitative Auger analysis: I. Monte Carlo calculations of backscattering factors for standard materialsSurface Science, 1981
- An interpretation of quantitative analysis of Arthur and LePore for AlxGa1–xAs using AESJournal of Vacuum Science and Technology, 1981
- Study of preferential sputtering on binary alloy by in-situ Auger measurement of sputtered and sputter-deposited surfacesSurface Science, 1977
- Auger study of preferred sputtering on binary alloy surfacesSurface Science, 1976
- Sputtering of the alloy systems AgAu, AuCu, and AgCu studied by Auger electron spectroscopyNuclear Instruments and Methods, 1976