A general solution method for two-dimensional nonplanar oxidation

1 September 1983

journal article
Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices

Vol. 30 (9), 993-998
https://doi.org/10.1109/t-ed.1983.21252

Abstract

Two-dimensional oxidation is a moving-boundary problem involving steady-state oxidant diffusion and incompressible viscous flow. To solve the kinetic equations for the two-dimensional oxidation model, this work introduces a general numerical method that combines pressure/ velocity iteration with a boundary-value technique.

Keywords

MODEL
ITERATION
FLOW
INCOMPRESSIBLE
MOVING
VISCOUS
STEADY
NONPLANAR
SOLVE
PRESSURE/VELOCITY
FLOW

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