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Growth of CoSi2 on Si(001): Structure, defects, and resistivity
Home
Publications
Growth of CoSi2 on Si(001): Structure, defects, and resistivity
Growth of CoSi2 on Si(001): Structure, defects, and resistivity
JJ
J. R. Jimenez
J. R. Jimenez
LS
L. J. Schowalter
L. J. Schowalter
LH
L. M. Hsiung
L. M. Hsiung
KR
K. Rajan
K. Rajan
SH
Shin Hashimoto
Shin Hashimoto
RT
R. D. Thompson
R. D. Thompson
SI
S. S. Iyer
S. S. Iyer
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1 May 1990
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 8
(3)
,
3014-3018
https://doi.org/10.1116/1.576622
Abstract
No abstract available
Cited by 36 articles