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Metallizing of silicon nitride with amorphous active filler metal
Home
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Metallizing of silicon nitride with amorphous active filler metal
Metallizing of silicon nitride with amorphous active filler metal
MN
M. Naka
M. Naka
MK
M. Kubo
M. Kubo
IO
I. Okamoto
I. Okamoto
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1 September 1986
journal article
Published by
Springer Nature
in
Journal of Materials Science Letters
Vol. 5
(9)
,
855-856
https://doi.org/10.1007/bf01729250
Abstract
No abstract available
Keywords
ACTIVE FILLER
AMORPHOUS ACTIVE
FILLER METAL
SILICON NITRIDE
METALLIZING OF SILICON
Cited by 2 articles