A study of the gaseous etching of germanium by oxygen
- 30 June 1967
- journal article
- Published by Elsevier in Surface Science
- Vol. 7 (2), 109-124
- https://doi.org/10.1016/0039-6028(67)90120-3
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
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