High flux beam source of thermal rare-gas metastable atoms
- 1 April 1980
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 13 (4), 381-383
- https://doi.org/10.1088/0022-3735/13/4/004
Abstract
A high-flux beam source has been constructed for the production of helium, neon and argon metastable atoms. The source is a DC electric discharge maintained in an expanding gas. A metastable flux of 3.5*1014, and 7.2*1013 atoms s-1 sr-1 has been achieved with most probable energies of 66, 72 and 74 meV for the helium, neon and argon sources, respectively. Time-of-flight measurements showed the widths of the respective velocity distributions to be 45%, 27% and 27%.Keywords
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