Comparison of guided-wave interferometric modulators fabricated on LiNbO3 via Ti indiffusion and proton exchange
- 15 July 1983
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 43 (2), 131-133
- https://doi.org/10.1063/1.94280
Abstract
Guided‐wave electro‐optic Mach–Zehnder interferometric modulators have been fabricated on LiNbO3. The channel waveguides were formed by titanium indiffusion in some devices and proton exchange in benzoic acid in others. The modulators were tested at 0.85‐μm and/or 1.3‐μm wavelengths for insertion loss, electro‐optic activity, and susceptibility to optical damage. A substantial reduction in the electro‐optic activity accompanied by a reduced susceptibility to optical damage is measured for the proton‐exchanged modulators.Keywords
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