X-ray photoelectron spectroscopy (XPS) of hydrogenated amorphous silicon carbide (a-SixC1-x:H) prepared by the plasma CVD method
- 14 March 1990
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 23 (3), 316-320
- https://doi.org/10.1088/0022-3727/23/3/008
Abstract
No abstract availableKeywords
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