Behaviours of High-Energy Electrons and Neutral Atoms in the Sputtering of BaTiO₃

Publisher Website

1 December 1975

journal article
Published by IOP Publishing in Japanese Journal of Applied Physics

Vol. 14 (12), 1875-1879
https://doi.org/10.1143/jjap.14.1875

Abstract

No abstract available

Keywords

SECONDARY ELECTRON

Cited by 33 articles