High Tc Thin Films of (La1-xMx)yCuO4-δ (M=Sr, Ba, Ca) Prepared by Sputtering

Abstract
Sputtering of (La1-x Sr x ) y CuO4-δ has produced superconducting oxide films which have higher T c values than any other oxide superconducting films so far prepared : T c onset at 36 K and the temperature of zero resistivity at 17 K have been achieved. Superconduction was also observed in the films with partial substitution of Sr in (La1-x Sr x ) y CuO4-δ by Ba or Ca. The Meissner effect was confirmed by the measurement of dc magnetic susceptibility on the film specimen having the zero resistivity temperature of 17 K.