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Study of planarized sputter-deposited SiO2
Home
Publications
Study of planarized sputter-deposited SiO2
Study of planarized sputter-deposited SiO2
CT
C. Y. Ting)
C. Y. Ting)
VV
V. J. Vivalda
V. J. Vivalda
HS
H. G. Schaefer
H. G. Schaefer
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1 May 1978
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 15
(3)
,
1105-1112
https://doi.org/10.1116/1.569519
Abstract
No abstract available
Cited by 58 articles