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Magnetron sputtering: basic physics and application to cylindrical magnetrons
Home
Publications
Magnetron sputtering: basic physics and application to cylindrical magnetrons
Magnetron sputtering: basic physics and application to cylindrical magnetrons
JT
John A. Thornton
John A. Thornton
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1 March 1978
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 15
(2)
,
171-177
https://doi.org/10.1116/1.569448
Abstract
No abstract available
Keywords
LOW PRESSURE
MAGNETIC FIELD
MAGNETRON SPUTTERING
ENERGY TRANSFER
QUANTUM MECHANICS
Cited by 301 articles