Some considerations on the electric field induced in insulators by electron bombardment

Abstract

Starting from a simple model of the distributions of charge created in an insulator by bombardment with electrons, the components of the electric field are evaluated by using Maxwell’s equations and image effects. The results are applied to the most common experimental situations: a semi-infinite sample (i) bounded by a vacuum or (ii) covered by a conducting film, and a sample in the form of a film (iii) unsupported or (iv) covering a conducting substrate. The results are compared to some experimental data concerning, for instance, electromigration and electron-stimulated desorption. In surface analysis the decay of the Auger signal from ions of opposite charges and the opposite behavior of ions of the same charge are explained. Similar effects observed in electron-probe microanalysis of glasses are also elucidated. The results concern scanning electron microscopy, transmission electron microscopy, and electron-beam lithography applied to biological objects, polymers, ceramics, minerals, glasses, and electronic devices. With slight modifications, the same model can be applied to cases of irradiation with ions or x rays. The evolution of the trapped charges with time is suggested, and the need to indicate the electric parameters (ε and γ) of the investigated samples is outlined.