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Scaling of SOI/PMOS transistors
Home
Publications
Scaling of SOI/PMOS transistors
Scaling of SOI/PMOS transistors
HS
H.J. Singh
H.J. Singh
KS
K.C. Saraswat
K.C. Saraswat
JS
J.D. Shott
J.D. Shott
JM
J.P. McVittie
J.P. McVittie
JM
J.D. Meindl
J.D. Meindl
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1 January 1983
proceedings article
Published by
Institute of Electrical and Electronics Engineers (IEEE)
https://doi.org/10.1109/iedm.1983.190442
Abstract
No abstract available
Keywords
VOLTAGE
ETCHING
SHORT CHANNEL EFFECT
ANNEALING
SILICON
ALUMINUM
Cited by 3 articles