Piezoelectric micromotors for microrobots
- 1 March 1992
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 1 (1), 44-51
- https://doi.org/10.1109/84.128055
Abstract
By combining new robot control systems with piezoelectric motors and micromechanics, we propose creating micromechanical systems which are small, cheap and completely autonomous. We have fabricated small - a few millimeters in diameter - piezoelectric motors using ferroelectric thin films and consisting of two pieces: a stator and a rotor. The stationary stator includes a piezoelectric film in which we induce bending in the form of a traveling wave. Anything which sits atop the stator is propelled by the wave. A small glass lens placed upon the stator becomes the spinning rotor. Using thin films of PZT on silicon nitride memebranes, various types of actuator structures have been fabricated.Keywords
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