Formation of SiC particles from Si(CH3)Cl3 by a plasma gas phase reaction
- 31 August 1983
- journal article
- Published by Elsevier in Journal of the Less Common Metals
- Vol. 92 (2), L5-L7
- https://doi.org/10.1016/0022-5088(83)90505-2
Abstract
No abstract availableFunding Information
- Ministry of Education, Culture, Sports, Science and Technology