Butt coupled photodiodes integrated with Y-branched optical waveguides on InP

Abstract
A pair of GaInAs photodiodes was integrated to the output waveguides of an optical Y-branch. Light was butt coupled to the photodetective zone which was formed by GaInAs LPE growth refilling deep etched holes. Total light conversion with more than 90% internal quantum efficiency at 1.55µm wavelength was achieved. The best diodes exhibited dark currents of 1 nA at −10 V bias voltage.

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