Effects of beam parameters on excimer laser deposition of YBa2Cu3O7−δ
- 5 February 1990
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 56 (6), 578-580
- https://doi.org/10.1063/1.103303
Abstract
Broad angular distributions have been observed for XeCl laser ablation plumes used in the deposition of YBa2Cu3O7−δ thin films. Distributions (inferred from film thickness) and film stoichiometry were measured as a function of laser fluence, beam shape, and oxygen pressure. Parallel to the long axis of the laser spot, plumes exhibited a cos3.5(θ) spread and composition varied with angle; in the perpendicular direction, more diffuse [cos1.5(θ)] plume distributions were associated with stoichiometric deposition. The observed phenomena are consistent with formation of a Knudsen layer near the target surface.Keywords
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