Continuous-wave emission in the ultraviolet from diatomic excimers in a microdischarge
- 25 May 1998
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 72 (21), 2634-2636
- https://doi.org/10.1063/1.121439
Abstract
Emission on the I2 (D′→A′), XeI (B2Σ1/2+→X2Σ1/2+) and XeO (2 3Π→1 3Π) bands, peaking in the ultraviolet at 342, 253 and 238 nm, respectively, has been generated on a continuous basis in a microdischarge with a static gas fill. Discharges are produced in Kr/I2, Xe/I2, or Xe/O2 gas mixtures by cylindrical devices 400 μm in diameter and fabricated in silicon. Rare-gas–halide and –oxide microdischarge lamps are attractive ultraviolet or vacuum ultraviolet sources and XeI, in particular, appears to be a potential replacement for Hg resonance line radiation (253.7 nm).Keywords
This publication has 19 references indexed in Scilit:
- Excilamp producing up to 130 W of output power and possibility of its applicationsLaser and Particle Beams, 1997
- The adsorption of I2 on Si(111)-7 × 7 studied by soft X-ray photoemissionSurface Science, 1993
- Dry Etching of Single‐Crystal Silicon Trench in Hydrogen Iodide Containing Plasmas: I . PureJournal of the Electrochemical Society, 1993
- Discharge-excited free jet source of rare gas-halide and oxide moleculesJournal of Applied Physics, 1992
- Observation of continuous KrCl excimer fluorescence in microwave discharges employing binary mixtures of Kr and Cl2Canadian Journal of Physics, 1991
- Chemiluminescent reactions of rare gas atoms, Rg(ns, 3P2, 3P1, 1P1) with N2O, SCO and SeCO: Spectroscopy and energy disposal in rare gas oxide, sulphide and selenide excimersChemical Physics Letters, 1987
- Xenon oxide and xenon sulfide emission systems at 234 and 227 nmChemical Physics Letters, 1986
- Thermochemical and kinetic studies of the xenon halide B and C states in 0.5-5 atmospheres of buffer gasThe Journal of Physical Chemistry, 1983
- High efficiency KrF excimer flashlampOptics Communications, 1980
- Vacuum UV emission from reactions of metastable inert gas atoms: Chemiluminescence of ArO and ArClChemical Physics Letters, 1974