X-ray investigation of Ti-Si thin films prepared by solid phase reaction
- 1 March 1986
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 137 (2), 243-249
- https://doi.org/10.1016/0040-6090(86)90026-x
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Kinetics of TiSi2 formation by thin Ti films on SiJournal of Applied Physics, 1983
- Resistivities of Thin Film Transition Metal SilicidesJournal of the Electrochemical Society, 1982
- Thin film interaction between titanium and polycrystalline siliconJournal of Applied Physics, 1980