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Prepared Low Stress Cubic Boron Nitride Film by Physical Vapor Deposition
Home
Publications
Prepared Low Stress Cubic Boron Nitride Film by Physical Vapor Deposition
Prepared Low Stress Cubic Boron Nitride Film by Physical Vapor Deposition
PZ
P.W. Zhu
P.W. Zhu
YZ
Y.N. Zhao
Y.N. Zhao
BW
B. Wang
B. Wang
ZH
Z. He
Z. He
DL
D.M. Li
D.M. Li
GZ
G.T. Zou
G.T. Zou
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1 September 2002
journal article
Published by
Elsevier
in
Journal of Solid State Chemistry
Vol. 167
(2)
,
420-424
https://doi.org/10.1016/s0022-4596(02)99647-7
Abstract
No abstract available
Keywords
CUBIC BORON NITRIDE
IR SPECTROSCOPY
INTERNAL STRESS.
Cited by 9 articles