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Large-scale sputtering of indium–tin oxide
Home
Publications
Large-scale sputtering of indium–tin oxide
Large-scale sputtering of indium–tin oxide
FG
F. Howard Gillery
F. Howard Gillery
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1 March 1978
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 15
(2)
,
306-308
https://doi.org/10.1116/1.569577
Abstract
No abstract available
Keywords
TIN OXIDE
LARGE
SCALE SPUTTERING OF INDIUM
Cited by 12 articles