Focusing in sputtering
- 17 July 1972
- journal article
- Published by Elsevier in Physics Letters A
- Vol. 40 (3), 231-232
- https://doi.org/10.1016/0375-9601(72)90669-x
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- The energy distribution of sputtered atoms from goldRadiation Effects, 1972
- A contribution to sputtered ejection patterns from collision sequences in atomic cascades: Firm evidence from channeling experimentsRadiation Effects, 1972
- A New Structure in langle110rangle Spots on Sputtered Ejection Patterns from Single Crystals of GoldPhysica Scripta, 1971
- Randomisation of crystal structure within energetic collision cascades revealed by the sputtering of Au single crystals during ion bombardmentRadiation Effects, 1971
- On the Mechanism of SputteringPhysica Status Solidi (b), 1966