Spatial resolution and detection sensitivity in microanalysis by electron energy loss selected imaging

Abstract
An electron energy filter of the Castaing-Henry type in a high resolution transmission electron microscope was tested for sensitivity and spatial resolution at a specific electron energy loss in energy selected images of a murine leukaemia virus. Electron spectroscopic images of phosphorus within the virus membrane bilayer demonstrated a best spatial resolution between 0·3 and 0·5 nm and a sensitivity of 2 × 10−21 g.