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Substrate heater for bias sputtering and ion plating applications
Home
Publications
Substrate heater for bias sputtering and ion plating applications
Substrate heater for bias sputtering and ion plating applications
RB
R. D. Bland
R. D. Bland
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1 September 1974
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 11
(5)
,
906-907
https://doi.org/10.1116/1.1318091
Abstract
No abstract available
Cited by 2 articles