Microscopic circuit fabrication on refractory superconducting films
- 1 November 1973
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 44 (11), 1621-1624
- https://doi.org/10.1063/1.1686013
Abstract
Fabrication of thin film refractory metal superconducting weak links by photoresist and selective anodization techniques is described. Structures as small as 0.3 μ have been fabricated with registry of subsequent structures to a precision of better than 0.5 μ.Keywords
This publication has 1 reference indexed in Scilit:
- Proximity effect bridge and superconducting microcircuitryJournal of Applied Physics, 1973