Measurement of oxygen-diffusion-profiles in silicon-single-crystals by means of the nuclear reaction 18O(p, α)15N
- 1 January 1973
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 106 (1), 109-113
- https://doi.org/10.1016/0029-554x(73)90052-9
Abstract
No abstract availableKeywords
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