Superconducting (Nd,Ce)2CuO4 thin films grown by rf magnetron sputtering

Abstract
Thin films of an electron-doped-type (Nd,Ce)2CuO4 system have been prepared by rf magnetron sputtering and subsequent annealing. The films showed a highly oriented structure with the c axis normal to the film plane. They exhibited superconductivity after the reducing treatment by heating at 800–900 °C in vacuum. The resistivity of the films was fairly low with metallic characteristics, and the sign of the Hall coefficient was negative in the normal state. The sharp superconducting transition with zero resistivity at 22 K was observed for the film of Nd/Ce/Cu:1.855/0.145/1.2.