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Structure and Electrical Properties of Titanium Nitride Films
Home
Publications
Structure and Electrical Properties of Titanium Nitride Films
Structure and Electrical Properties of Titanium Nitride Films
YI
Yasuhiro Igasaki
Yasuhiro Igasaki
HM
Hiroji Mitsuhashi
Hiroji Mitsuhashi
KA
Koichi Azuma
Koichi Azuma
TM
Tokio Muto
Tokio Muto
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1 January 1978
journal article
Published by
IOP Publishing
in
Japanese Journal of Applied Physics
Vol. 17
(1)
,
85-96
https://doi.org/10.1143/jjap.17.85
Abstract
No abstract available
Keywords
ELECTRICAL PROPERTIES
STRUCTURE AND ELECTRICAL
TITANIUM NITRIDE
NITRIDE FILMS
Cited by 60 articles