Direct visual observation of powder dynamics in rf plasma-assisted deposition
- 16 September 1991
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 59 (12), 1409-1411
- https://doi.org/10.1063/1.105322
Abstract
Contamination due to particles generated and suspended in silane rf plasmas is investigated. Powder is rendered visible by illumination of the reactor volume. This simple diagnostic for global, spatio‐temporal powder dynamics is used to study particle formation, trapping, and powder reduction by power modulation.Keywords
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