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State Of The Art Of Acrylate Resists: An Overview Of Polymer Structure And Lithographic Performance
Home
Publications
State Of The Art Of Acrylate Resists: An Overview Of Polymer Structure And Lithographic Performance
State Of The Art Of Acrylate Resists: An Overview Of Polymer Structure And Lithographic Performance
WM
Wayne M. Moreau
Wayne M. Moreau
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30 June 1982
conference paper
Published by
SPIE-Intl Soc Optical Eng
Vol. 333
,
2-8
https://doi.org/10.1117/12.933404
Abstract
The acrylate family of resists have been the most popular choice of positive resists for advanced lithography. Over the last decade, polymethylmethacrylate (PMMA) and derivatives of the general formula continue to show improved performance
Keywords
ACRYLATE RESISTS
FORMULA CONTINUE
LITHOGRAPHIC PERFORMANCE
POLYMER
POPULAR CHOICE
STATE OF THE ART
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Open Access
Cited by 5 articles