Picosecond, tunable ArF* excimer laser source
- 1 December 1982
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 41 (11), 1032-1034
- https://doi.org/10.1063/1.93383
Abstract
A 40-mJ ArF* laser with pulse duration ∼10 ps and spatial and spectral properties close to the transform limits is described. Substantial extraction of the available energy from the final amplifier is demonstrated, a fact providing direct evidence against the presence of significant nonlinear losses in the amplifying medium up to an intensity of ∼1 GW/cm.2Keywords
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