Development of an electret microphone in silicon

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17 May 1989

journal article
Published by Elsevier in Sensors and Actuators

Vol. 17 (3-4), 509-512
https://doi.org/10.1016/0250-6874(89)80038-1

Abstract

No abstract available

Keywords

This publication has 1 reference indexed in Scilit:

Investigations of the surface conductivity of silicon dioxide and methods to reduce it
Surface Science, 1987

Cited by 42 articles