Adhesion evaluation of r.f.-sputtered aluminium oxide and titanium carbide thick films from grown carbide tools
- 1 May 1981
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 79 (1), 91-100
- https://doi.org/10.1016/0040-6090(81)90432-6
Abstract
No abstract availableKeywords
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